Field-Emission Scanning Electron Microscope (FESEM)



The instrument is installed with a field-emission gun and a specimen stage with three motorized axes. The accelerating voltage is adjustable from 0.5 to 30kV. In addition to secondary electron detectors, it is also equipped with a retractable back-scattered electron detector and a JEOL JED-2300F Energy Dispersive Spectrometer (EDS).